A new concept in fabricating building blocks for nanoelectronic and nanomechanic devices

V. Ya. PrinzCorresponding Author Contact Information, E-mail The Corresponding Author

Institute of Semiconductor Physics, Lavrent'ev av. 13, Novosibirsk 630090, Russia

Available online 14 June 2003.


This review outlines a new fabrication concept for three-dimensional (3D) nanoshells that can be obtained, in a self-formed manner, from several-monolayer (ML) thick semiconductor or metal thin-film planar structures. Fabrication of InGaAs/GaAs, SiGe/Si cylindrical micro- and nanoshells (tubes, spirals, and rings) is described. New results on the formation of periodic structures, open and closed single-crystal 3D nanoshells of various shapes with a minimum radius of curvature of ~1 nm, and also on assembling these shells in more complex architectures are reported. Possible applications of structures obtained by the new technology are considered.

Author Keywords: Strained heterostructures; Nanoshells; Nanotubes

Corresponding Author Contact InformationCorresponding author. Tel.: +7-38-3233-0699; fax: +7-38-3233-3502.