A new concept in fabricating building blocks for nanoelectronic and nanomechanic devices
Institute of Semiconductor Physics, Lavrent'ev av. 13, Novosibirsk 630090, Russia
Available online 14 June 2003.
This review outlines a new fabrication concept for three-dimensional (3D) nanoshells that can be obtained, in a self-formed manner, from several-monolayer (ML) thick semiconductor or metal thin-film planar structures. Fabrication of InGaAs/GaAs, SiGe/Si cylindrical micro- and nanoshells (tubes, spirals, and rings) is described. New results on the formation of periodic structures, open and closed single-crystal 3D nanoshells of various shapes with a minimum radius of curvature of ~1 nm, and also on assembling these shells in more complex architectures are reported. Possible applications of structures obtained by the new technology are considered.
Author Keywords: Strained heterostructures; Nanoshells; Nanotubes