Metrological measurements and signal processing in SEM based on the model of signal formation

Alexey I. ChulichkovCorresponding Author Contact Information, E-mail The Corresponding Author, Eugene A. Grachev, Dmitry M. Ustinin and Eugene A. Cheremukhin

Department of Physics, Lomonosov Moscow State University, Moscow 119899, Russia

Available online 22 July 2003.


A Monte-Carlo model of an SEM image and spectra formation has been developed. Computer-aided measurement systems theory and morphological image analysis were applied for the signal processing. It is shown that the methods improve detectors' and sensors' characteristics. Morphological analysis increases the accuracy of the objects' size and position measurement.

Author Keywords: SEM signal formation; Morphological analysis of images; Backscattered emission spectra; Theory of computer-aided measuring systems

Corresponding Author Contact InformationCorresponding author.