Other publications from this meeting: Microelectronics Engineering issue, and Computational Materials Science issue.
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Monograph: |
Editors: |
Title Page.......i |
Preface.......v |
Table of Contents.......vii |
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Peter M. Zeitzoff, James A. Hutchby,
Gennadi Bersuker, and Howard R. Huff Integrated Circuit Technologies: From Conventional CMOS to the nanoscale era. pp. 1-25. |
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Konstantin Likharev Electronics Below 10 nm pp. 27-68. |
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Kevin Lucas, Sergei Postnikov,
Cliff Henderson, Scott Hector Lithography: Concepts, Challenges, and Prospects pp. 69-128. |
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Susanne Stemmer and Darrell G. Schlom Experimental Investigations of the Stability of Candidate Materials for High-K Gate Dielectrics in Silicon-Based MOSFETs pp. 129-150. |
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A.L. Shluger, A.S. Foster, J.L.Gavartin,
and P.V. Sushko Defects in wide-gap oxides: Computer modelling and challenges pp. 151-222. |
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John Tomfohr, Jun Li, and Otto Sankey Tunneling Through Single Molecules pp. 223-236. |
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P.M. Lenahan Practical Quantum Computing pp. 237-250. |
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Subject Index pp. 251 and next |