Silicon–based Optical Integrated Circuits for Terabit-rate Optical Networks.
DWDM - revolution in optical communication promisses 100-fold transmission
rate jump of fiber-optical cannels. Expected exponential growth of Internet
facility and traffic, Fiber-To-The-Home (FTTH) national programs will demand
enormous bandwidth. Paper discusses:
Optical Integrated Circuits on SiO2:
Ge (SiON)/Si- structures (SiOIC) - the base element of
Dense Wavelength Devision Multiplexer and spectral optical channel switch
devices; the specificity of SiOIC's manufacturing, thick-layer PECVD and
deep-trench RIE technological processes; and micromechanical technique of the
fiber-planar optical wavequide connection.
Other important topics: passive DWDM SiOIC's;
functional principles of the planar optical DWDM and
the volume analog; the Array Waveguide Grating (AWG) as a synthesis of the
Michelson's Echelon and the Phased Antenna Array (PHASAR), and spectral
selective Add-Drop SiOIC; DWDM optical switches;
Waveguide thermooptical modulator and Mach-Zehnder 2x2
switch element; Controlled Add-drop and wavelength selective switch circuits
examples; Challenge and prospect of optical switch on SiOIC's;
fast optical switches on Silicon-on-Isolator (SOI) structures;
electrooptical modulators on plasma dispersion effect in Si-core waveguides.